Electrical Engineering |
Chemical Engineering |
Industrial Engineering |
Materials Engineering |
Note the following difference between the MS
and MSE options:
The Masters of Science in Engineering (MSE) is a non-thesis option, which
requires 30 credits of coursework plus a report and presentation or a written exam at the end
of the program.
The Masters of Science (MS) degree is a thesis option, which requires 21-24
credits of coursework and 6-9 credits of research and thesis (total of 30
credits). This degree involves carrying out original research, writing a
thesis, and an oral defense of the thesis.
Admissions Requirements for Non-Degree-Seeking Students
Anyone may take courses at ASU, and up to 9 credit hours may later
be applied towards a graduate degree.
Admissions Guidelines for MS and MSE degrees:
1) In general, ASU encourages applications from engineers employed in local
industry. First priority is usually given to students with BS degrees in
their chosen field of study with an undergraduate GPA of 3.0 or higher in
their last 60 credit hours.
2) Applicants with an undergraduate GPA below 3.0 may be directly admitted in special cases, or they may be encouraged to take several graduate courses as "non-degree-seeking students" to strengthen their background. Good performance in several courses (an average of 3.0 or higher) will lead to reconsideration of applicants. Up to 9 credits taken as a "non-degree-seeking student" can be counted towards a graduate degree.
3) Students may apply for an MS or MSE degree in a field other than their BS degree, but some additional "deficiency" courses are required.
4) Admission is done on a case by case basis, and some departments have higher criteria due to larger numbers of applicants.
TO REQUEST ADMISSIONS APPLICATIONS, CONTACT:
Chemical Engineering & Materials Engineering:
contact Marlene Bolf, 965-5558
marlene.bolf@asu.edu
Electrical Engineering:
contact Darleen Mandt, 965-3424
eeinfo@enpop1.eas.asu.edu
Industrial Engineering:
contact
Maggi Langley, 965-6990
icfml@asuvm.inre.asu.edu
or John Fowler, 965-3727
john.fowler@asu.edu
or George Runger, 965-3193
runger@asu.edu
EEE 436/591 Fundamentals of Solid State Devices
CHE 458/598 Semiconductor Material Processing
MSE 598 Materials Issues in Semiconductor Processing
IEE 591 DOE/SPC for Semiconductor Processing
The list below is a list of SUGGESTED technical electives in the area of semiconductor processing and manufacturing. See the general catalog for a full list of courses at ASU, and see the timetable for each semester to determine what is being offered that semester. Students should discuss electives with their advisor prior to registering.
The prefix F, S and Su are used to indicate Fall, Spring and Summer courses, respectively. The suffix E is given if a course is a late afternoon-evening course. The suffix W is given if a course is a weekend course. The suffix TV is given if a course is also televised.
For the description of courses marked with an "*" see "Descriptions for Courses . . ." at the end of the list , all other courses are described in the general course catalog. Each subsection title is a link to the respective subpage of the general course catalog.
Chemical Engineering Courses
CHE 458/598 Semiconductor Materials Processing (F-E)
* CHE 461 Principles of Process Control (F-TV)
* CHE 598 Environmentally-Conscious Manufacturing Environment (S-TV)
* CHE 598 Deposition and Etch Processes (S-E)
Electrical Engineering Courses
EEE 435/591 Microelectronics(S)
EEE 436/591 Fundamentals of Solid State Devices (F-E, S, Su-TV)
EEE 439/591 Semiconductor Facilities & Cleanroom Practices(F)
EEE 525 VLSI Design or ECE 598 (S, F, Su)
EEE 530 Advanced Silicon Processing (S-TV)
EEE 531 Semiconductor Device Theory I (F-TV)
EEE 532 Semiconductor Device Theory II (S-TV)
EEE 534 Semiconductor Transport (S)
EEE 536 Semiconductor Characterization (S-TV)
EEE 539 Introduction to Solid State Electronics (F-TV)
EEE 631 Heterojunctions and Superlattices (F)
EEE 731 Advanced MOS Devices (S-TV)
Industrial Engineering Courses
IEE 532 Management of Technology
IEE 561 Production Systems (F)
IEE 570 Advanced Quality Control (S-E)
IEE 572 Design of Engineering Experiments (F,S)
IEE 573 Reliability Engineering (F-E)
IEE 574 Deterministic Operations Research (F)
IEE 575 Stochastic Operations Research (S)
*IEE 591 Modeling and Analysis of Semiconductor Manufacturing(S-E (99 & 01))
*IEE 591 Legal Aspects of Engineering (F-E)
*IEE 591 DOE/SPC for Semiconductor Processing
Mechanical and Aerospace Engineering
MAE 591 Semiconductor packaging (F)
Materials Engineering
*MSE 494/598 Computer Modelling of Materials (F-E)
MSE 471 Ceramics (F)
MSE 494/598 Growth & Processing of Semiconductor Materials
(includes lab in cleanroom) (F)
MSE 550 Advanced Materials Characterization (F-E)
MSE 558 Electron Microscopy I (F)
MSE 559 Electron Microscopy II (S)
MSE 562 Ion Implantation (S)
*MSE 590 Electronic Thin Film Science (varies)
MSE 598 Materials Issues in Semiconductor Processing (E-S)
MSE 596 (SEM 558) Electron Microscopy Lab (F)
MSE 597 (SEM 559) Electron Microscopy Lab (S)
Science and Engineering of Materials
*SEM 494/598 Vacuum System Science and Engineering (S-E-TV)
Electronics and Computer Technology
UET 416/417 Monolothic Integrated Circuit Devices/Lab (F-W) (Saturdays, 8:30AM - 4:40 PM)
UET 432 Semiconductor Packaging & Heat Transfer (S)
UET 437 Integrated Circuit Testing (S)
UET 513 Microelectronics Technology (S)
UET 516 IC Processing Technology and Integration (F-E)
UET 518 Hybrid IC Technology and Applications (S)
*UET 598 Device Physics (F-E)
Business
To Be Announced
Descriptions for Courses Not Listed in the General Catalog
CHE 598 Environmentally-Conscious Semiconductor Manufacturing Environment:
Students will be introduced to the principles used in evaluating the environmental impacts
of manufacturing processes, including environmental impact assessment, life cycle assessment,
product stewardship, and waste auditing procedures. Students will use real-life examples to
apply these principles to manufacturing environments.
CHE 598 Deposition and Etch Processes:
First principles, physically-based modeling and simulation of deposition and etch processes
in microelectronics manufacturing.
CHE 461 Principles of Process Control:
Model-based analog and digital process control. Dynamic response, feedback, cascade and
feedforward control, Internal Model Control (IMC) and frequency response design procedures.
IEE 591 Legal Aspects of Engineering:
IEE 591 Modeling and Analysis of Semiconductor Manufacturing:
Concepts of how modeling and analysis tools and techniques can improve decision making in
semiconductor manufacturing are covered. Particular emphasis is placed on operational and
cost modeling for wafer fabs, assembly/test operations, and the entire semiconductor enterprise.
IEE 591 DOE/SPC for Semiconductor Processing:
MSE 494/598 Computer Modelling of Materials:
Overview of many different state-of-the-art computer simulation methods,
including the basic underlying theory, advantages and limitations of each method,
and a practical 3-hour lab activity in how to use each code.
Each student also works on an individual project, investigating one of the methods in greater depth.
No previous computer experience required.
Prerequisite: ECE 350 or equivalent.
MSE 590 Electronic Thin Film Science:
This course is a fundamental approach to thin-film science that covers
growth of epitaxial layers and interdiffusion and reactions in thin films.
The course will begin with reliability issues involving electromigration,
voids/hillocks and metallization for integrated circuits. The conditions
for epitaxial growth, such as used in semiconductor heterostructures, will
be contrasted with those for amorphous or polycrystalline films. The role
of thermal processing for reactive thin films involving the formation of
surface oxides, metallic silicides and aluminides will be presented. Format
is combination of lecture and student-team presentations of case studies.
SEM 494/598 Vacuum System Science and Engineering:
Vacuum concepts, equipment, and systems are studied to give the student an
operational knowledge of modern vacuum technology. Equal emphasis is placed
on theoretical and practical instruction, with class time equally
distributed between lecture and laboratory sessions. Lab sessions consist
of exercises and tours to provide hands-on experience with and a working
perspective of the vacuum techniques and systems principally used in
industry, academia, and government laboratories.
UET 598 Device Physics