Control of Re-entrant Semiconductor Fabrication Lines


Arizona State University
College of Engineering and Applied Science
System Science and Engineering Research Center
Department of Electrical Engineering
Box 87-7606, GWC 612
Tempe, AZ 85787-7606
aar@asu.edu
TEL: (602) 965-3712
FAX: (602) 965-0461


Supported by Intel Research Council
Intel Corporation
Sponsor: Dr. Karl Kempf
Technology and Manufacturing Group
Chandler, AZ



Description of Research

The focus of this multidisciplinary research effort is to use system and control analysis and design methodologies to develop improved methods for modeling and controlling re-entrant semiconductor fabrication lines.


Investigators

This multidisciplinary research effort involves a team of faculty from the following departments:

Chemical Engineering

Dr. Daniel E. Rivera.

Electrical Engineering

Dr Armando A. Rodriguez, Dr. Kostas S. Tsakalis.

Mathematics

Dr. Matthias Kawski.


Other Participants

Mathematics

Dr. Dieter Armbruster, Dr. Tom Taylor.


Selected Publications and Links

K. Kempf, "Intel Five-Machine Six Step Mini-Fab Description," Intel/ASU Report, 1994.
Time-Optimal Control for Re-entrant Semiconductor Fabrication Lines
A Release Policy Governor for Re-entrant Semiconductor Fabrication Lines
Hierarchical Modeling and Control of Re-entrant Semiconductor Fabrication Lines
A Control-Theoretic Approach to Scheduling of Semiconductor Fabrication Lines
Hierarchical Modeling and Control for Re- entrant Semiconductor Fabrication Lines: A Mini-Fab Benchmark (pdf)



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