INTRODUCTION

A set of factory-level datasets describing several semiconductor wafer fabrication facilities is available from this site and via anonymous ftp. The datasets have been made available in order to facilitate the evaluation and comparison of simulation tools, analytic tools, and fab control strategies.

OVERVIEW

There currently exist a wide variety of commercial, corporate, and university developed simulation and analytical tools for the analysis of wafer fabs. There have also been a number of strategies and rules developed to control the flow of product in a wafer fab. However, it has been difficult for semiconductor manufacturers, as well as for suppliers and researchers, to evaluate and compare these tools and strategies. One of the major problems in such comparisons has been the lack of representative data. The purpose of this effort was to provide planners, researchers and software suppliers with actual data and models that can be used to benchmark their control strategies and software. The data set format was developed by Gerry Feigin (IBM), John Fowler (SEMATECH-now ASU), and Robert Leachman (University of California- Berkeley). The datasets are available to anyone.

DETAILS

• FACTORY LEVEL DATASETS

The factory level datasets are available on this site and via anonymous ftp from 'ftp.sematech.org' in directory '/pub/datasets'. The testbed includes actual manufacturing data from several wafer fabrication facilities, organized into a standard format. The data sets do not include real product names, company names or other nomenclature that could serve to identify the source of the data. The datasets are as nonsensitive as possible, so that they may be widely circulated.

• STATISTICAL DATASETS

The statistical datasets have been divided into statistical techniques. Each technique is an individual folder which contain various excel (.xls), text (.txt) and a zip (.zip) file. Each text file has an excel file under the same name. In each directory, we have provided a zip file which contains all the files in that particular directory in a compressed form.

QUESTIONS

For questions regarding the testbed datasets, contact John Fowler (john.fowler@asu.edu). It is requested that anyone who uploads the testbed datasets send an email to John Fowler with your name, address, and purpose for using the testbed. This will allow us to notify you of any changes to the testbed (e.g. when new datasets are released). It will also be helpful, in general, for us to know how many people are using the testbed, and for what sorts of purposes. Also, if you have a data set that you would like to donate, please contact John Fowler. Thank you.