Latest Papers |
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| Balasubramanian, H., Mönch, L., Fowler, J.W., and Pfund, M.E., "Minimizing Total Weighted Tardiness on Parallel Batch Process Machines Using Genetic Algorithms", International Journal of Production Research, to appear. | |
| Fowler, J.W., Horng, S-M, and Cochran, J.K., "A Hybridized Genetic Algorithm to Solve Parallel Machine Scheduling Problems with Sequence Dependent Setups", International Journal of Industrial Engineering, to appear. | |
| Carlyle, W.M., Fowler, J.W., Gel, E., and Kim, B., "Evaluating the Quality of Approximate Solution Sets for Multiple Objective Optimization Problems", Decision Sciences, to appear. | |
| Greiner, M.A., Fowler, J.W., Shunk, D.L., Carlyle, W.M., and McNutt, R.T., "A Hybrid Approach Using the Analytic Hierarchy Process and Integer Programming to Screen Weapon Systems Projects", IEEE Transactions on Engineering Management, to appear. | |
| Dabbas, R.M. and Fowler, J.W., "A New Scheduling Approach Using Combined Dispatching Criteria in Semiconductor Manufacturing Systems", IEEE Transactions on Semiconductor Manufacturing, to appear. | |
| Cochran, J.K, Horng, S-M, and Fowler, J.W., "A Multi-Population Genetic Algorithm to Solve Multi-Objective Scheduling Problems for Parallel Machines", Computers and Operations Research, Vol. 30, No. 7, pp. 1087-1102, 2003. | |
| Dabbas, R. M., Fowler, J.W., Rollier, D.A., and McCarville, D., "Multiple Response Optimization Using Mixture Designed Experiments and Desirability Function in Semiconductor Scheduling", International Journal of Production Research, Vol. 41, No. 5, pp. 939-961, 2003. | |
| Phojanamongkolkij, N., Fowler, J.W., and Cochran, J.K., "Determining 'Optimal' Policies for Batch-Processing Machines of a Wafer Fabrication Facility", Journal of Manufacturing Systems, Vol. 21, No. 5, pp. 363-379, 2002. | |
| Fowler, J.W., G.L.Hogg., and S.J. Mason., "Workload Control in the Semiconductor Industry", Production Planning and Control Special Issue on Workload Control, Vol. 13, No. 7, pp. 568-578, 2002. | |
| Mackulak, G.T., Park, S., Keats, J.B., and Fowler, J.W., "A Sequential Stopping Rule for Steady State Simulation Based on Time Series Forecasting", Transactions of the Society for Computer Simulation International, Vol. 78, No. 11, pp. 643-654, 2002. | |
| Skinner, K.R., Montgomery, D.C., Runger, G.R., Fowler, J.W., McCarville, D.R., Rhoads, T.R., and Stanley, J.D., "Multivariate Statistical Methods for Modeling and Analysis of Wafer Probe Test Data", IEEE Transactions on Semiconductor Manufacturing, Vol. 15, No. 4, 2002, pp. 523-530. | |
| Park, S., Fowler, J.W., Mackulak, G.T., Keats, J.B., and Carlyle, W.M., "D-Optimal Sequential Experiments for Generating a Simulation-Based Cycle Time-Throughput Curve", Operations Research, Vol. 50, No. 6, 2002, pp. 981-990. | |
| Perry, L. A., Montgomery, D. C., and Fowler, J. W., "Partition Experimental Designs for Sequential Processes: Part II - Second-Order Models", Quality and Reliability Engineering International, Vol. 18, No. 5, 2002, pp. 373-382. | |
| Yu, L., Shih, H.M., Pfund, M., Carlyle, W.M., and Fowler, J.W., "Scheduling of Unrelated Parallel Machines: An Application to PWB Manufacturing", IIE Transactions on Scheduling and Logistics, Vol. 34, No. 11, 2002, pp. 921-931. | |
| Solomon, L., Fowler, J., Pfund, M., and Jensen, P., "The Inclusion of Future Arrivals and Downstream Setups into Wafer Fabrication Batch Processing Decisions", Journal of Electronics Manufacturing, Vol. 11, No. 2, 2002, pp. 149-159. | |
| Mason, S.J., Fowler, J.W., and Carlyle, W.M., "A Modified Shifting Bottleneck Heuristic for Minimizing the Total Weighted Tardiness in a Semiconductor Wafer Fab", Journal of Scheduling, Vol. 5, No. 3, 2002, pp. 247-262. | |
| Fowler, J.W., Phojanamongkolkij, N., Cochran, J.K., and Montgomery, D.C., "Optimal Batching in a Wafer Fabrication Facility Using a Multi-Product G/G/c Model with Batch Processing", International Journal of Production Research, Vol. 40, No. 2, 2002, pp. 275-292. | |
| Pfund, M., Yu, L., Fowler, J., and Carlyle, W., "The Effects Of Processing Time Variability And Equipment Downtimes On Various Scheduling Approaches For A Printed Wiring Board Assembly Operation", Journal of Electronics Manufacturing, Vol. 11, No. 1, 2002, pp. 19-31. | |
| Perry, L. A., Montgomery, D. C., and Fowler, J. W., "Partition Experimental Designs for Sequential Processes: Part I - First-Order Models", Quality and Reliability Engineering International, Vol. 17, No. 6, 2001, pp. 429-438. | |
| Carlyle, W.M, Knutson, K., and Fowler, J.W., "Bin Covering Algorithms in the Second Stage of the Lot to Order Matching Problem", Journal of the Operational Research Society, Vol. 52, No. 11, 2001, pp. 1232-1243. | |
| Fowler, J.W., Park, S., Mackulak, G.T., and Shunk, D. L., "Efficient Cycle Time-Throughput Curve Generation Using a Fixed Sample Size Procedure", International Journal of Production Research, Vol. 39, No. 12, 2001, pp. 2595-2613. | |
| Dabbas, R.M., Chen, H.-N., Fowler, J.W., and Shunk, D.L., "A Combined Dispatching Approach to Scheduling Semiconductor Manufacturing Systems", Computers and Industrial Engineering, Vol. 39, 2001, pp. 307-324. | |
| Mackulak, G.T., Savory, P.A., "A Simulation Based Experiment for Comparing AMHS Performance in a Semiconductor Fabrication Facility", IEEE Transactions on Semiconductor Manufacturing, Vol. 14, No. 3, August 2001, pp. 273-280. | |
| Fowler, J.W., Knutson, K., and Carlyle, W.M., "Comparison and Evaluation of Lot-To-Order Matching Policies for a Semiconductor Assembly and Test Facility", International Journal of Production Research, Vol. 38, No. 8, 2000, pp. 1841-1853. | |
| Paprotny, I., Shiau, J., Huh, Y., and Mackulak, G.T., "A Simulation Based Comparison of Semiconductor AMHS Alternatives: Continuous Flow vs. Overhead Hoist", Proceedings of the Winter Simulation Conference 2000, Orlando, FL, December 2000, pp. 1333-1337. | |
| Colvin, T.D., Hennessy, L.S., and Mackulak, G.T., "Semiconductor Layout Alternatives Enabled by Modular Fab Design Concepts and AMHS Linkage", Proceedings of ASCE 2000, ISBN: 0-7844-0475-5, February 2000, pp. 727-736. | |
| Paprotny, I., Yngve, J., Mackulak, G.T., and Gaskins, B., "Applying Conservative Distributed Simulation to a Large Scale Automated Material Handling Design", Proceedings of the Communication Networks and Distributed Systems Modeling and Simulation (CNDS) Conference WMC 2000, January 2000, pp. 107-112. | |
| Colvin, T., Hennesey, L., and Mackulak, G.T., "Material Logistics System Analysis, Design, Layout, and Simulation Necessary to be I300I Factory Guideline Compliant", Future Fab International, January 2000, pp. 95-100. | |
| Fowler, J.W., G.L.Hogg., and D.T.Phillips., "Control of Multiproduct Bulk Server Diffusion/Oxidation Processes Part Two: Multiple Servers", IIE Transactions on Scheduling and Logistics; Vol. 32, No. 2,2000, pp. 167-176. | |
| Wu, S., Rayter, J., Paprotny, I., Mackulak, G.T., and Yngve, J., "Increasing First Pass Accuracy of AMHS Simulation Output Using Legacy Data", Proceedings of the Winter Simulation Conference '99, December 1999, pp. 784-789. | |
| Paprotny, I., Zhao, W., and Mackulak, G.T., "Reducing Model Creation Cycle Time by Automated Conversion of a CAD AMHS Layout Design", Proceedings of the Winter Simulation Conference '99, December 1999, pp. 779-783. | |
| Runger, G.C., and J W.Fowler., "Control Charts from Anova Partitions: Contrasts and Hierarchies", Quality and Reliability Engineering International, Vol. 14, 1998, pp. 1-12. | |
| Knutson, K., K Kempf., J W Fowler.,and M Carlyle.,"Lot-to-order matching for a semiconductor assembly & test facility",IIE Transactions on Scheduling and Logistics, Vol. 31, No. 11, 1999, pp. 1103-1111. | |
| Fowler, J.W., J.K.Cochran., and S-M.Horng.,"A Group-Technology-Coded Literature Review of Semiconductor Manufacturing Publications",The MASMLAB Bibliography Web Site",IEEE Transactions on Semiconductor Manufacturing, Vol. 12, No. 2, 1999, pp. 259-263. | |
| Fowler, J.W.,R.A.Aguilar., and C.A.Flores., "A Simulation Methodology for Evaluating the Impact of Layout on the performance of Assembly/Packaging/Test Operations",Submitted to IEEE Transactions on Components,Packaging and Manufacturing Technology,Part C:Manufacturing,August 08, 1997. | |
| Montgomery, D.C., J.B.Keats., J.W. Fowler, G.C.Runger., and G.Rajavelu., "Statistical Monitoring Techniques For Contamination Data",Journal of the Institute of Environmental Sciences, Vol.40,No.2,1997,pp.23-30. | |
| Robinson,J., J.W.Fowler., and J.Bard., "The Use of Upstream and Downstream Information in Scheduling Semiconductor Batch Operations", International Journal of Production Research, Vol.33,No.7,1995,pp.1849-1870. | |
| Duenyas,I., J.W.Fowler., and L.W.Schruben., "Planning and Scheduling in Japanese Semiconductor Manufacturing", Journal of Manufacturing Systems,Vol.13,No.5,1994,pp.323-332. | |
| Fowler,J.W.,D.T.Philips., and G.L.Hogg.,"Control of Multiproduct Bulk Server Diffusion/Oxidation Processes",IEE Transactions , Vol.24,No.4,1992,pp 84-96. | |
| Wilhelm,W.E. and J.W.Fowler., "Workshop on Electronics Manufacturing Research",IIE Transactions,Vol.24,No.4,1992,pp.6-17. | |
| Fowler,J.W.,D.T.Philips.,and G.L.Hogg., "Real Time Control of Multiproduct BulkService Semiconductor Manufacturing Processes", IEEE Transactions on Semiconductor Manufacturing,Vol.5,No.2,1992,pp.158-163. | |
| Robinson,J., L.W.Schruben., and J.W.Fowler., "Experimenting with Large-Scale Semiconductor Manufacturing Simulations:A Frequency Domain Approach to Factor Screening",Proceedings of the First IE Research Conference,LosAngeles,CA,May 26-27,1993,pp.112-116. | |
| Klutke,G.A., M.Kammer-kerwick., and J.W.Fowler., "Stochastic Control of Wafer Fabrication Processes in Semiconductor Manufacturing",Proceedings of the First IE Research Conference,Chicago,IL,May 20-21,1992,pp.449-453. | |
| Fernando, E., Fowler, J.W., and Scullion, T., "Evaluation of RAMS-DO1 as a Tool for Project Programming",Transportation Research Record,No. 1262, 1990, pp. 105-115. |
| Balasubramanian, H., Mönch, L., Fowler, J.W., and Pfund, M.E., "Minimizing Total Weighted Tardiness on Parallel Batch Process Machines Using Genetic Algorithms", International Journal of Production Research, to appear:
... |
|
| Fowler, J.W., Horng, S-M, and Cochran, J.K., "A Hybridized Genetic Algorithm to Solve Parallel Machine Scheduling Problems with Sequence Dependent Setups", International Journal of Industrial Engineering, to appear:
... |
|
| Carlyle, W.M., Fowler, J.W., Gel, E., and Kim, B., "Evaluating the Quality of Approximate Solution Sets for Multiple Objective Optimization Problems", Decision Sciences, to appear:
... |
|
| Greiner, M.A., Fowler, J.W., Shunk, D.L., Carlyle, W.M., and McNutt, R.T., "A Hybrid Approach Using the Analytic Hierarchy Process and Integer Programming to Screen Weapon Systems Projects", IEEE Transactions on Engineering Management, to appear:
... |
|
| Dabbas, R.M. and Fowler, J.W., "A New Scheduling Approach Using Combined Dispatching Criteria in Semiconductor Manufacturing Systems", IEEE Transactions on Semiconductor Manufacturing, to appear:
... |
|
| Cochran, J.K, Horng, S-M, and Fowler, J.W., "A Multi-Population Genetic Algorithm to Solve Multi-Objective Scheduling Problems for Parallel Machines", Computers and Operations Research, Vol. 30, No. 7, pp. 1087-1102, 2003:
... |
|
| Dabbas, R. M., Fowler, J.W., Rollier, D.A., and McCarville, D., "Multiple Response Optimization Using Mixture Designed Experiments and Desirability Function in Semiconductor Scheduling", International Journal of Production Research, Vol. 41, No. 5, pp. 939-961, 2003:
... |
|
| Phojanamongkolkij, N., Fowler, J.W., and Cochran, J.K., "Determining 'Optimal' Policies for Batch-Processing Machines of a Wafer Fabrication Facility", Journal of Manufacturing Systems, Vol. 21, No. 5, pp. 363-379, 2002:
... |
|
| Fowler, J.W., G.L.Hogg., and S.J.Mason.,"Workload
Control in the Semiconductor Industry"Production Planning and Control
Special Issue on Workload Control, Vol. 13, No. 7, pp. 58-578, 2002: This paper describes
the state-of-the-art in workload control as applied to the semiconductor
industry. The focus is on examining the concepts behind workload control
heuristics and evaluating their effectiveness, overhead requirements, and
implementability. Individual sections provide an overview of the distinctive
elements in a semiconductor manufacturing environment, general dispatching
methods, order release strategies, and future directions. |
|
| Mackulak, G.T., Park, S., Keats, J.B., and Fowler, J.W., "A Sequential Stopping Rule for Steady State Simulation Based on Time Series Forecasting", Transactions of the Society for Computer Simulation International, Vol. 78, No. 11, pp. 643-654, 2002:
... |
|
| Skinner, K.R., Montgomery, D.C., Runger, G.R., Fowler, J.W., McCarville, D.R., Rhoads, T.R., and Stanley, J.D., "Multivariate Statistical Methods for Modeling and Analysis of Wafer Probe Test Data", IEEE Transactions on Semiconductor Manufacturing, Vol. 15, No. 4, 2002, pp. 523-530:
... |
|
| Park, S., Fowler, J.W., Mackulak, G.T., Keats, J.B., and Carlyle, W.M., "D-Optimal Sequential Experiments for Generating a Simulation-Based Cycle Time-Throughput Curve", Operations Research, Vol. 50, No. 6, 2002, pp. 981-990:
... |
|
| Perry, L. A., Montgomery, D. C., and Fowler, J. W., "Partition Experimental Designs for Sequential Processes: Part II - Second-Order Models", Quality and Reliability Engineering International, Vol. 18, No. 5, 2002, pp. 373-382:
... |
|
| Yu, L., Shih, H.M., Pfund, M., Carlyle, W.M., and Fowler, J.W., "Scheduling of Unrelated Parallel Machines: An Application to PWB Manufacturing", IIE Transactions on Scheduling and Logistics, Vol. 34, No. 11, 2002, pp. 921-931:
... |
|
| Solomon, L., Fowler, J., Pfund, M., and Jensen, P., "The Inclusion of Future Arrivals and Downstream Setups into Wafer Fabrication Batch Processing Decisions", Journal of Electronics Manufacturing, Vol. 11, No. 2, 2002, pp. 149-159:
... |
|
| Mason, S.J., Fowler, J.W., and Carlyle, W.M., "A Modified Shifting Bottleneck Heuristic for Minimizing the Total Weighted Tardiness in a Semiconductor Wafer Fab", Journal of Scheduling, Vol. 5, No. 3, 2002, pp. 247-262:
... |
|
| Fowler, J.W., Phojanamongkolkij, N., Cochran, J.K., and Montgomery, D.C., "Optimal Batching in a Wafer Fabrication Facility Using a Multi-Product G/G/c Model with Batch Processing", International Journal of Production Research, Vol. 40, No. 2, 2002, pp. 275-292:
... |
|
| Pfund, M., Yu, L., Fowler, J., and Carlyle, W., "The Effects Of Processing Time Variability And Equipment Downtimes On Various Scheduling Approaches For A Printed Wiring Board Assembly Operation", Journal of Electronics Manufacturing, Vol. 11, No. 1, 2002, pp. 19-31:
... |
|
| Perry, L. A., Montgomery, D. C., and Fowler, J. W., "Partition Experimental Designs for Sequential Processes: Part I - First-Order Models", Quality and Reliability Engineering International, Vol. 17, No. 6, 2001, pp. 429-438:
... |
|
| Carlyle, W.M, Knutson, K., and Fowler, J.W., "Bin Covering Algorithms in the Second Stage of the Lot to Order Matching Problem", Journal of the Operational Research Society, Vol. 52, No. 11, 2001, pp. 1232-1243:
... |
|
| Fowler, J.W., Park, S., Mackulak, G.T., and Shunk, D. L., "Efficient Cycle Time-Throughput Curve Generation Using a Fixed Sample Size Procedure", International Journal of Production Research, Vol. 39, No. 12, 2001, pp. 2595-2613:
... |
|
| Dabbas, R.M., Chen, H.-N., Fowler, J.W., and Shunk, D.L., "A Combined Dispatching Approach to Scheduling Semiconductor Manufacturing Systems", Computers and Industrial Engineering, Vol. 39, 2001, pp. 307-324:
... |
|
| Mackulak, G.T., Savory, P.A., "A Simulation Based Experiment for Comparing AMHS Performance in a Semiconductor Fabrication Facility", IEEE Transactions on Semiconductor Manufacturing, Vol. 14, No. 3, August 2001, pp. 273-280:
... |
|
| Paprotny, I., Shiau, J., Huh, Y., and Mackulak, G.T., "A Simulation Based Comparison of Semiconductor AMHS Alternatives: Continuous Flow vs. Overhead Hoist", Proceedings of the Winter Simulation Conference 2000, Orlando, FL, December 2000, pp. 1333-1337:
... |
|
| Colvin, T.D., Hennessy, L.S., and Mackulak, G.T., "Semiconductor Layout Alternatives Enabled by Modular Fab Design Concepts and AMHS Linkage", Proceedings of ASCE 2000, ISBN: 0-7844-0475-5, February 2000, pp. 727-736:
... |
|
| Paprotny, I., Yngve, J., Mackulak, G.T., and Gaskins, B., "Applying Conservative Distributed Simulation to a Large Scale Automated Material Handling Design", Proceedings of the Communication Networks and Distributed Systems Modeling and Simulation (CNDS) Conference WMC 2000, January 2000, pp. 107-112:
... |
|
| Colvin, T., Hennesey, L., and Mackulak, G.T., "Material Logistics System Analysis, Design, Layout, and Simulation Necessary to be I300I Factory Guideline Compliant", Future Fab International, January 2000, pp. 95-100:
... |
|
| Fowler, J.W., Knutson, K., and
Carlyle, W.M., "Comparison and Evaluation of Lot-To-Order Matching
Policies for a Semiconductor Assembly and Test Facility", International
Journal of Production Research, Vol. 38, No. 8, 2000, pp. 1841-1853:
This paper is motivated by the problem of assigning semiconductor fabrication
wafer lots to customer orders of various sizes. The goal of this research
is to develop a method for deciding, on a given day, which orders to fill
and the assignment of available lots to orders. This problem can be formulated
as an integer program with a non-linear objective and non-linear constraints.
Because of the complexity of this formulation, he problem is decomposed
into two integer linear programs and solved in sequence by heuristic methods.
In this paper, heuristic solutions are selected for the two subproblems
and the performances of these heuristics are analyzed in an experimental
design using a representative data set. Based on this analysis, it is shown
that the greedy heuristics selected perform significantly better than the
current practice. Finally, future research is discussed. |
|
| Fowler, J.W., G.L.Hogg., and D.T.Phillips., "Control
of Multiproduct Bulk Server Diffusion/Oxidation Processes Part Two: Multiple
Servers" IEE Transactions on Scheduling and Logistics; Vol. 32, No.
2,2000, pp. 167-176.: This research investigates how knowledge of future
arrivals can be used to control bulk server diffusion and oxidation processes
in order to reduce the average time that lots spend waiting to be processed.
While past research has dealt with the control of bulk server queueing systems;
only a few studies addressed the use of knowledge of future arrivals, and
those studies were limited to a single server system.
The research reported herein first examines the single product-multiple servers case, then a more general, multiple products-multiple servers case is considered. In both cases, a control strategy is devised and then tested through the use of simulation. The performance of these new control strategies is compared to the performance of the optimal control strategy not considering the timing of any future arrivals (i.e. a Minimum Batch Size strategy). The experimental results indicate that the new control strategies developed perform well under a wide variety of circumstances. In order to demonstrate the
multiple products-multiple servers control strategy performance in a realistic
setting, a detailed simulation model of the diffusion area of an existing
wafer fabrication facility was developed. The model was run with several
start rates and the results were compared with similar runs employing
a Minimum Batch Size strategy. Results indicate that the new strategy
performs well over the wide range of start rates simulated.The new control
strategy also has another important advantage over a Minimum Batch Size
strategy in that it is parameter free. |
|
| Wu, S., Rayter, J., Paprotny, I., Mackulak, G.T., and Yngve, J.,"Increasing First Pass Accuracy of AMHS Simulation Output Using Legacy Data", Proceedings of the Winter Simulation Conference '99, December 1999, pp. 784-789:... |
|
| Paprotny, I., Zhao, W., and Mackulak, G.T.,"Reducing Model Creation Cycle Time by Automated Conversion of a CAD AMHS Layout Design", Quality Proceedings of the Winter Simulation Conference '99, December 1999, pp. 779-783:... |
|
| Runger, G.C., and J W.Fowler.,"Control
Charts from Anova Partitions: Contrasts and Hierarchies", Quality and
Reliability Engineering International, Vol. 14, 1998, pp1-12. :In
semiconductor manufacturing, it is useful to design control charts to be
sensitive to anticipated assignable causes. Hierarchical control charts
based on linear contrasts are generated from partitions of standard ANOVA
sums of squares. These control statistics are related to those used for
multiple stream processes.The ANOVA partitions simplify the development
and interpretation of charts sensitized for specific assignable causes.
The use of EWMA control charts for these statistics are described |
|
| Knutson, K., K Kempf., J W Fowler.,and M Carlyle.,"Lot-to-order
matching for a semiconductor assembly & test facility",IIE Transactions
on Scheduling and Logistics, Vol. 31, No. 11, 1999, pp. 1103-1111. :This
paper is motivated by the problem of assigning semiconductor fabrication
wafer lots to customer orders of various sizes. Inefficiently assigning
lots to the order prior to the final assembly and test process can have
a severe impact on the company's profits because of the high cost of materials
consumed in this process and the potential for producing large amounts of
excess inventory.
The goal of this research is to develop a method for deciding, on a given day, which orders to fill and the assignment of available lots to orders. This decision should be made in order to effectively utilize the capacity of the assembly/test facility, to minimize "wasted" product,i.e.,excess product in partially consumed lots that must be sent to a storage facility, and to maximize on-time delivery of customer orders. This problem can be formulated as an integer program with a nonlinear objective and nonlinear constraints. However, it is well known that such integer programs are intractable. Because of the complexity of this formulation we decompose the problem into two linear programs and solve them in sequence by heuristic methods. The two sub problems in this decomposition are the choice of orders to be filled given a capacity constrained factory, followed by filling of these orders by available lots. The solution to the first problem is therefore used as data in the second problem. In this paper we describe the problem and it's formulation, focussing
primarily on the decomposition into a two stage problem. We then discuss
current practice, and propose a simple greedy heuristic. We compare their
relative performances using a representative data set. Based on this analysis,
we show that our greedy heuristic performs significantly better than current
practice. Finally, we give an indication of future research. |
|
| Fowler, J.W., J.K.Cochran., and S-M.Horng."A
Group-Technology-Coded Literature Review of Semiconductor Manufacturing
Publications"The MASMLAB Bibliography Web Site",IEEE Transactions on
Semiconductor Manufacturing, Vol. 12, No. 2, 1999, pp. 259-263. :Modeling
and simulation of semiconductor manufacturing operations is a rapidly developing
area with a supporting published literature that is exploding in size. In
this paper, we present a study of that literature which we use to build
a searchable database that is implemented as an Internet site (http://www.eas.asu.edu/~masmlab/Biblio.html).
The semiconductor manufacturing modeling community needs a focused, electronically
accessible, and better structured bibliographic resource. To accomplish
this, we have developed a database that uses a group technology coding of
articles based upon index searching. The importance of this database is
not only in collecting many pertinent articles for users, but also in classifying
them. The objectives of this site are to be useful to industrial practitioners,
faculty members, students, and software developers, and widely available,
economically feasible, and easily managed. The user can search the database
by problem type, measurement metric, modeling technique, organization decision
level, publication year, and publication type to find desirable article
lists within a short time. We show that our database is superior to two
general purpose commercial Web-based bibliographic services. The Modeling
and Analysis of Semiconductor Manufacturing Laboratory (MASMLAB) database
currently contains 421 coded articles relevant to the modeling and analysis
of semiconductor manufacturing. |
|
| Fowler, J.W., R.A.Aguilar., and C.A.Flores., "A
Simulation Methodology for Evaluating the Impact of Layout on the performance
of Assembly/Packaging/Test Operations"Submitted to IEEE Transactions
on Components,Packaging and Manufacturing Technology,Part C:Manufacturing,August
08, 1997.:The cost of capital equipment in the semiconductor industry
is rising dramatically in an increasing competitive market. This places
a heavy burden on factories to acheive lower cost, more aggressive cycle
time goals, and increased equipment throughput.In order to meet these goals,
the causes of productivity loss must be understood.This knowledge can contribute
to more accurate factory output forecasts.This paper presents a modeling
and simulation methodology that can be used to analyze the productivity
and capacity of Assembly/Packaging/Test (A/P/T) facilities.The project consists
of building and exercising a realistic model of A/P/T operations to study
the influence of seven key productivity loss factors. The impact of the
layout on the performance of a particular A/P/T facility is examined using
the methodology. |
|
| Montgomery, D.C., J.B.Keats., J.W. Fowler, G.C.Runger., and G.Rajavelu., "Statistical
Monitoring Techniques For Contamination Data",Journal of the Institute
of Environmental Sciences, Vol.40,No.2,1997,pp.23-30. :Monitoring
of particle contamination by statistically based methods is used extensively
in semiconductor manufacturing.Often Shewart-type control charts are used
for this purpose.These charts suffer from some potential disadvantages in
this application environment.Specifically they are slow to detect shifts
or changes in the level of particle contamination and, in some situations,the
underlying statistical assumptions of the charts are inappropriate for contamination
data.We suggest the use of cumulative sum and exponential weighted moving
average control charts for monitoring particle contamination.The advantages
of these charts for the types of particle contamination data typically encountered
in semiconductor manfacturing are discussed and illustrated with examples. |
|
| Robinson,J., J.W.Fowler., and J.Bard.,"The
Use of Upstream and Downstream Information in Scheduling Semiconductor Batch
Operations", International Journal of Production Research, Vol.33,No.7,1995,pp.1849-1870.
: This paper presents a control strategy that exploits and uses both
upstream and downstream information on the current and expected states of
a semiconductor manufacturing facility(FAB) to make intelligent batch size
decisions.Through simulation,this strategy is compared with current methods
that consider only upstream information,as well with a general threshold
policy.The results confirm that significant improvemnts in cycle time can
be realized by exploiting upstream information.Some additional improvement
can be gained at low to moderate traffic intensities by looking down stream.However,as
traffic intensity increases,use of downstream information may lead to longer
delays,indicating that the scheduling of the batch machine may be more important
than the scheduling of the serial machine in congested systems. |
|
| Duenyas,I., J.W.Fowler., and L.W.Schruben.,"Planning
and Scheduling in Japanese Semiconductor Manufacturing", Journal of Manufacturing
Systems,Vol.13,No.5,1994,pp.323-332. :Described are some methods
used by Japanese semiconductor manufacturing companies for long-term planning
and short-term scheduling and shop floor control.Tools and Techniques used
for planning and scheduling in wafer fabrication are identified.General
findings are discussed,and specific efforts at four companies are described
in detail. |
|
| Fowler,J.W., D.T.Philips., and G.L.Hogg"Control
of Multiproduct Bulk Server Diffusion/Oxidation Processes", IEE Transactions
, Vol.24,No.4,1992,pp 84-96. :This paper demonstrates how knowledge
of future arrivals can be used to control bulk service diffusion and oxidation
processes.The objective of the research reported herein is to reduce the
average time that lots spend waiting to be processed.A review of the current
literature reveals that several researchers have dealt with the control
of bulk service queuing systems;however,only one has addressed the use of
knowledge of future arrivals and it only considered the case of a single
product and a single server.
This research reexamines the single product-single server case and then
explores the multiple products-single server case.For both cases,a control
strategy is devised and evaluated through the use of systems simulation.The
steady-state performance of each control strategy is then compared to
the steady state performance of the theoritical optimal control strategy
not considering the timing of future arrivals(i.e.a Minimum Batch Size
strategy).The experimental results indicate that the control strategies
developed in this paper perform well under most circumstances. |
|
| Wilhelm,W.E and J.W.Fowler.,"Workshop
on Electronics Manufacturing Research", IIE Transactions,Vol.24,No.4,1992,pp.6-17.
:The workshop on Electronics Manufacturing Research was held in College
Station,Texas,on February 24-26,1992.It focused on the Industrial Engineering/Operations
Research/Management Science disciplines and their capabilities in modeling,analysis,and
manufacturing technology.the primary goal was to identify the critical research
needs in electronics manufacturing and assembly that can be addressed by
these disciplines and the means of accomplishing them.
Sponsors included the Production Systems Program of National Science Foundation(NSF),three organizations at Texas A&M University(the department of Industrial Engineering,the Texas Engineering Experiment Station,and the Institute of Manufacturing Systems),and SEMATECH.In addition,Ford Electronics,IBM,and INTEL each sponsored one representative. Individuals recognized for their research accomplishments in electronics
industry were to participate.Representing ongoing programs across the
United States and Mexico in industry,government,and academia,the group
identified fertile research directions as a guide for the research community
and sponsoring agencies.Intereacting tracks dealt with semiconductor manufacturing
and circut card(and higher level)assembly.This paper documents the important
research themes identified relative to three topic areas:integrating systems,models
for design and operation of production/assembly systems,and assurance
sciences.It also summarizes a lively discussion which sought ways to improve
the effectiveness of university/industry partnering relationships.This
paper includes essential recommndations that resulted from the Workshop,but
the interested reader can obtain a somewhat Final Report from Dr.Wilbert
E.Wilhelm,the Principal Investigator for the Workshop project. |
|
| Fowler,J.W.,D.T.Philips.,and G.L.Hogg"Real Time
Control of Multiproduct BulkService Semiconductor Manufacturing Processes",IEEE
Transactions on Semiconductor Manufacturing,Vol.5,No.2,1992,pp.158-163.
:This paper demonstrates how knowledge of future arrivals can be used
to improve control of multiproduct bulk-service semiconductor manufacturing
processes.The objective of the research reported herein is to reduce the
average time that lots spend waiting to be processed.A review of the current
literature reveals that several researchers have dealt with the control
of bulk service queuing systems;however,only one has addressed the use of
knowledge of future arrivals and it only considered the single product case.This
research reexamines the single-product-single-tube case and then explores
the multiple-products single tube case.For both cases,a control strategy
i sdevised and evaluated through the use of a systems simulation.The steady-state
performance of each control strategy is then compared to the steady-state
performance of theoritically optimal control strategy not considering the
timing of any future arrivals(i.e., a Minimum Batch Size strategy).The expeiments
results indicate that the control strategies developed in this paper perform
well under a wide variety of condition. |
|
| Robinson,J., L.W.Schruben., and J.W.Fowler.,"Experimenting
with Large-Scale Semiconductor Manufacturing Simulations:A Frequency Domain
Approach to Factor Screening", Proceedings of the First IE Research Conference,LosAngeles,CA,May
26-27,1993,pp.112-116. :Frequency domain experiments can provide
an efficient way to identify important factors of a real system through
the use of simulation models.In these experiments,input factors are oscillated
at different frequencies.Detecting an oscillation in the input of a particular
frequency indicates that the corresponding input variable (or an interaction)
has significant impact.This technique is illustrated in factor screening
and bottleneck analysis of an actual semiconductor wafer fabrication facility. |
|
| Klutke,G.A., M.Kammer-kerwick., and J.W.Fowler.,"Stochastic
Control of Wafer Fabrication Processes in Semiconductor Manufacturing",
Proceedings of the First IE Research Conference,Chicago,IL,May 20-21,1992,pp.449-453.
: Problems arising in semiconductor manufacturing have recently stimulated
research in the analysis of non-traditional production process.Wafer fabrication,to
take an example,is a cmplex process with a number of features that distinguishes
it from more traditional flow-shop or job-shop processes.In this paper,
some salient features and problems associated with modeling wafer fabrication
are presented and the development of a stochastic control framework for
studying these complex systems is discussed. |
|
| Fernando, E., Fowler, J.W., and Scullion, T.,"Evaluation of RAMS-DO1 as a Tool for Project Programming",
Transportation Research Record, No. 1262, 1990, pp. 105-115
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