ASU/MIT/UIC Factory Sciences Research Project
Informal Update - July 1, 1998
Contact: John Fowler (john.fowler@asu.edu)

This report covers the period from the contract start (October 1) through June 30, 1998.
 

Contents:

1. Virtual Center Interactions

2. Current SRC Mentor List

3. Activities

4. Research Tasks Progress Report


1. Virtual Center Interactions

Collaboration within the Factory Sciences Virtual Center included the following:


2. SRC Mentors:

Our set of mentors for the period was the following:
 
Matt Hickie  Motorola ASU
Bob Baker  Intel  ASU
Court Hilton  Intel  ASU
Kishore Potti  AMD  ASU,UI 
Ed Yellig  Intel  MIT 
Larry Farey  LSI Logic  MIT
Jeriad Zoghby  AMD  MIT 
Steve Markle  Lucent  UI
Frank Alvarez  Intel  UI 
Bruce Sohn  Intel  UI 
Mani Janakiram  Motorola  UI
Ed Rietman  Bell Labs  UI 
Stuart Bermon   IBM  ASU,MIT,UI 
 

3. Activities

Project-related activities of team members included the following:

4. Research Tasks Progress Report

 

Task Title: Analysis of Wafer Fab Operations (task leader, Dr. P.R. Kumar)

Summary:

Wafer fabs feature a characteristic reentrant flow not found in other manufacturing systems. Key performance measures of such fabs are the cycle-time and WIP. It is of great interest to predict the performance of such a fab from the plant description.

The field of queueing networks has essentially had three waves of progress. The early work of the Danish teletraffic engineer Erlang was concerned with analyzing busy probabilities in telephone exchanges. Sub-sequent work of Jackson in the 1950s, motivated by the problem of predicting performance of job shops, obtained explicit solutions for certain systems, now called Jackson networks. In the 1970s this work was generalized to a larger class of product-form networks. Recently, new methods have been developed which have led to a fresh wave of progress. A procedure based on studying functionals of the system was developed by the PI which allows the development of performance bounds for systems with re-entrant process flows. It has also illustrated capacity loss problems arising from the use of priority policies. The dynamic programming approach allows for optimization of capacity decisions over time, in the face of yield, demand uncertainties, etc.

Status:

Jim Morrison and P.R. Kumar have developed new methods for obtaining bounds on the performance of re-entrant lines. This work has been documented in a paper entitled "New Linear Program Performance Bounds for Queueing Networks". This paper is to appear in Journal of Optimization Theory and Applications. The paper can be obtained from the location: http://black.csl.uiuc.edu/~prkumar/new.ps

In this paper, we obtain new linear programs for obtaining bounds on such performance measures. These bounds exploit the key facts that the transition probabilities of the mathematical queueing network models of the plants are shift invariant on the relative interiors of faces, and that the performance measures of interest, such as cycle-time and WIP,  are linear in the state of the system.
 
A systematic procedure for choosing different quadratic functions on the relative interiors of faces to serve as surrogates of the differential costs in an inequality relaxation of the average cost function leads to linear program bounds.  These bounds are provably better than earlier known bounds.  It is also shown how to incorporate additional features such as the presence of virtual multiserver stations to further improve the bounds.  The approach also extends to provide functional bounds valid for all arrival rates.

The UI researchers are also working with Motorola and Lucent personnel to test scheduling policies developed at UI.
 
 


Title: Modeling, Analysis and Design of Wafer Fabs (task leader, Dr. Stanley Gershwin)

Summary:

Semiconductor fabrication is among the most complex and expensive kinds of manufacturing, and it is a central part of the world's economy. All manufacturing is currently highly competitive, and if products are brought to market too late, or too expensively, or unreliably, the penalty can be in the billions of dollars. To design a manufacturing system efficiently, it is not sufficient to select equipment that can do the required processes. The system must meet performance objectives such as production rate, lead time, and delivery reliability. Analysis tools are need that evaluate proposed designs. Synthesis tools are needed to help designers configure systems that will meet
objectives in the most economical manner.

Existing methods for manufacturing system analysis suffer from many shortcomings. Simulation is time-consuming to build and to run and extremely difficult to debug. It is a crude tool for the design of systems, and ill-suited for determining operating policies. Conventional analytic methods for system evaluation such as queuing networks make simplifying assumptions that cast doubt on their results (unlimited inventory, reliable machines) and do not allow the modeling of operational policies.

We plan to build upon existing decomposition methods for production line analysis and on dynamic programming methods for real - time scheduling.

In earlier work, Markov process models of manufacturing systems were analyzed approximately by system decomposition. These models accounted for disruptions due to machine failures and for finite buffers. They considered the propagation of disruptions from machine to machine, in which a failure of one machine would cause buffers to be empty or full, and therefore other machines to be forced to be idle. Approximation is required because the large state spaces of such models can not be treated analytically or numerically. Decomposition seeks to replace a complex system by a set of simple systems which are chosen carefully. Existing methods have been shown to work well. We plan to
extend existing models to account for multiple part types and reentrant flow, which is essential for modeling semiconductor production.
 

Status:

Diego Syrowicz has joined Gershwin's group to study decomposition methods for predicting and optimizing fab performance. Joseph Nemec (Gershwin student) has succeeded in developing the first version of a mult-product manufacturing system decomposition. Predicted analytic results compare well with simulation.  This will appear in his PhD thesis (December, 1998) and papers to be written. Contact has been established with fabs at Kodak and HP.

 


Title: Scheduling Wafer Fab Operations (task leader, Dr. John Fowler)

Summary:

Wafer fabrication facilities are among the most complicated and expensive manufacturing systems. Competition in the semiconductor industry is constantly increasing. Customers today are concerned not only with product performance, but also with product cost and the ability of IC manufacturers to deliver products in a timely fashion. Scheduling policies attempt to get the right products done at the right time.  Several aspects of overall wafer fabrication scheduling are being studied. These include: 1) management of ion implantation processes; 2) reticle management; 3) operator cross training; and 4) a composite dispatch rule. Each of the efforts will be briefly discussed below.

Management Of Ion Implantation Processes: The management of ion implantation processes is one of several challenging problems in scheduling wafer fabrication facilities.  A complicating factor is the fact that there are sequence dependent setups (e.g. species changes). Because of the setups, it is sometimes desirable to leave an implanter idle (if another lot requiring this species will arrive soon) rather than to change the setup. There are several goals in managing an ion implantation area. These include: 1) maximizing the throughput; 2) minimizing the cycle time through the area; and 3) supplying the correct material to downstream constraint operations in a timely fashion.  A deterministic scheduling approach to this problem is investigated in this research.

Reticle Management: Photolithography performance is not only dependent upon the stepper and the track being available to process material, but it is also dependent upon the right reticle also being available. This effort focuses on the strategic, tactical, and operational aspects of reticle management. Strategically, decisions must be made as to how many copies of each reticle will be purchased. Tactically, reticle assignments to steppers must be decided. Operationally, real-time decisions must be made as to what material to run on which stepper.

Operator Cross Training: The operation of any wafer fabrication facility is highly dependent on both labor and equipment. Modeling a fab ignoring either labor constraints or bottleneck equipment could misrepresent cycle times, throughput rates, and work-in-process. The variety of equipment in wafer fab creates the need for a highly skilled labor force, characterized by a high level of cross-training, and the ability to monitor multiple machines at one time.
 
Composite Dispatch Rule: When a series of jobs in a queue are waiting in front of a machine or bank of machines to be processed, dispatching rules are used to sequence the order in witch the jobs are going to be processed. Commonly used dispatching rules (FIFO, EDD, SPT, etc.) only evaluate one performance measure to sequence the jobs through the machine or bank machines (Time in queue, Due date, Makespan, etc.) in an existing process. Composite dispatching rules consider more than one performance measure when deciding which lot to work on next.
 

Status:

Management Of Ion Implantation Processes: The overall approach is to run a factory simulation at the beginning of each shift, starting with the current WIP, to predict future arrivals to the implant area. This information is then used to schedule the lots thru the implanters for the upcoming shift.  The schedule is generated by first assigning lots to machines and then scheduling the individual machines. The schedule generated is then evaluated with respect to the three goals mentioned above and the CPU time required.  We study the use of a Genetic Algorithm(GA) to assign the lots to machines and consider two options for scheduling the individual machines: a composite dispatching rule and a GA. This approach is compared to the use of a simple dispatching policy. Effects of the GA parameters (population size, crossover rate, and mutation rate) are also examined. A paper on this topic will be presented at Techcon 98.

Reticle Management: Our efforts to date have been focused on the tactical decision of reticle assignment. The current approach is to run a simulation starting with the current WIP and machine status for the length of one shift in order to determine which lots will arrive to the photolithography during the next shift. We then formulate the problem of reticle assignment as an out-of-kilter network problem in order to maximize the throughput of lots through the area while keeping the number of reticle movements between steppers (and the reticle stocker) to a minimum. We are working closely with our Motorola sponsor on this effort and have started discussions with a Cornell intern currently working at Micrus.

Operator Cross Training: Determining the optimal number of operators trained for specific skill levels can be a key factor in meeting production requirements. In addition, it takes time to train an operator and the training cost is one of the major factors which is always considered by management. The objective of our research is how to determine the optimal number of operators to be trained for each skill levels for a certain period while keeping total training cost minimized. Both mathematical programming and simulation techniques are employed.

Composite Dispatch Rule: The Apparent Tardiness Cost with Setups (ATCS) rule is a heuristic that differs from the other commonly used dispatching rules.  Instead of taking only one performance measure into consideration to schedule jobs that are in a queue, it evaluates three: sequence dependent setups, job slack and job weight. The purpose of this dispatching rule is to minimize total weighted tardiness on either a single machine or a series of parallel machines in a given process. The sequence is generated by computing a priority index of every job that is in queue at any instant t when the machine is available. The job with the highest priority is the one that is going to be processed next. This heuristic can be divided into two phases, in the first phase a number of parameters characterizing the problem instance and two scaling factors (k1 and k2) are computed and in the second phase the priority index and schedule are calculated based on the results of the first phase.