CURRICULUM VITAE

 

 

Michael Nicolas Kozicki

 

Professor of Electrical Engineering

 

EDUCATION

 

Ph.D.  University of Edinburgh, United Kingdom, completed 1984/graduation 1985.  Thesis title: “Conductivity studies of polycrystalline-silicon films.”

B.Sc.  University of Edinburgh, United Kingdom, 1980.  Degree subject: Electronics and Electrical Engineering.  Awarded First Class Honours (summa cum laude).

 

 

ACADEMIC EXPERIENCE

 

July 2006 – present

            Director, Center for Applied Nanoionics, Arizona State University.

August 1996 - present

Professor, Department of Electrical Engineering, Arizona State University.

September 2003 – August 2004

            Interim (and Founding) Director of Entrepreneurial Programs, Fulton School of Engineering, Arizona State University.

July 1997 - June 2002

Director, Center for Solid State Electronics Research, Arizona State University.

August 1991 - August 1996

Associate Professor, Department of Electrical Engineering, Arizona State University.

August 1986 - August 1991

Assistant Professor, Department of Electrical Engineering, Arizona State University.

March 1985 - August 1986

Laboratory Manager and Senior Research Analyst, Center for Solid State Electronics Research, Arizona State University.

 

INDUSTRIAL EXPERIENCE

 

April 1996 - present

Chairman and Chief Technology Officer, Axon Technologies Corporation.

October 1983 - February 1985

Project Engineer, Hughes Microelectronics Ltd., U.K.

June - September 1980 and June - September 1979

Medical Engineer, Royal Infirmary of Edinburgh, U.K.

June - September 1978 and June - September 1977

Engineering trainee, Scottish Engineering Training Scheme, U.K.

 

AREAS OF TEACHING AND RESEARCH

 

Integrated/solid-state nanoionics, low-energy non-volatile memories, interconnect systems, optical switches, tunable nanomechanical resonators, and microfluidics.  Researcher with the Center for Solid State Electronics Research and affiliated faculty member with the School of Materials and Harrington Department of Bioengineering at Arizona State University.

 

 

SCIENTIFIC AND PROFESSIONAL SOCIETY MEMBERSHIPS

 

Member: Institution of Engineering and Technology (IET).

 

Member: Institute of Electrical and Electronics Engineers (IEEE).

 

Member: Eta Kappa Nu (HKN).

 

 

OTHER POSITIONS

 

Consultant to high-technology industry including (* = multiple or long term contracts):

 

Advanced Silicon Materials*                             Alcoa Electronic Packaging

ASM America*                                                Associates in Applied Research

Black and Veatch*                                           Burr-Brown

California Micro Devices*                                Clean Room Sciences*

Du Pont                                                            Enimont America

GTJS/Northern Telecom                                   IBM

Motorola*                                                        National Research Council of Canada

Research Corporation Technologies                  ServiceMaster*

Stanford University                                                         3M

Time-Warner Manufacturing*                           TNT Technology

U.S. Army                                                        Western Digital.

 

Chair of the Technical Committee for the Non-Volatile Memory Technology Symposium, 2007.

 

Member of the Technical Committee for the Non-Volatile Memory Technology Symposium, 2006.

 

Series Editor, “Solid State Science and Engineering Series”, Thomson Science, New York, NY.

 

Acting Laboratory Manager for the Center for Solid State Electronics Research, 1986 - 1987.

 

Faculty Associate for the Department of Electrical Engineering, 1985.

 

 

HONORS AND DISTINCTIONS

 

Founder, Axon Technologies Corporation.

 

Founding Member, Globalscot Network (appointed by the First Minister of Scotland).

 

Honorary Fellow, Faculty of Science and Engineering, University of Edinburgh.

 

Chartered Engineer (UK/EC Professional Engineer).

 

Charter member of the ASU Academic Council.

 

Member of the Board of the Arizona Nanotechnology Cluster.

 

Served on the Board of the Arizona Technology Council and the Governor's Council on Innovation and Technology, Technology Development and Transfer subcommittee.

 

Recipient of ASU Faculty Achievement Award for “Most Significant Invention”, 2007.

 

Honored by the ASU Commission on the Status of Women for outstanding achievement and contribution towards advancing the status of women, 2003.

 

Nominated for the Last Lecture Series by the students of ASU, 2003.

 

Best Paper Award, European Symposium on Phase Change and Ovonic Science (E*PCOS), 2006.

 

Best Paper Award, Non-Volatile Memory Technology Symposium (NVMTS), 2005.

 

Recipient of the IEEE Phoenix Section Outstanding Educator, Research Award, 2001.

 

Recipient of College of Extended Education Outstanding Faculty Award, 1995.

 

Nominated for the Lemelson-MIT Prize for Invention and Innovation, 1994.

 

Recipient of Governor’s Recognition Award, Team Award, 1993.

 

Invention (cleanroom wheelchair) received Semiconductor International Editors Choice Award for 1993.

 

Recipient of Golden Key National Honor Society Outstanding Professor Award, 1991.

 

Recipient of College of Engineering and Applied Sciences Teaching Excellence Award, 1989.

 

Awarded Institution of Electrical Engineers Younger Members Premium in 1982 and 1985.

 

 

PUBLICATIONS AND PRESENTATIONS

 

Invited talks at national/international conferences

 

“Nanoscale Pattern Definition Using Silicon Dioxide”, 191st Meeting of the Electrochemical Society, May, 1997.

 

"Application of Chemically Enhanced Vapor Etching in the Fabrication of Nanostructures", Second International Workshop on Surfaces and Interfaces of Mesoscopic Devices, Kanapali, Hawaii, December, 1997.

 

“Novel Uses of Silicon Dioxide in Deep-Submicron Device Fabrication”, Fifth International Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, 195th Meeting of the Electrochemical Society, May, 1999.

 

“Terabit Memories Are Made of This,” IEEE Symposium on VLSI Circuits, Kyoto, Japan, June 16-18, 2005.

 

“Highly Scalable Non-Volatile Memory Based on Solid Electrolytes,” Information Storage Industry Consortium (INSIC) Symposium on Alternative Storage Technologies, Monterey, CA, July, 2005.

 

KEYNOTE - “Nanostructured Solid Electrolytes for Non-Volatile Memory,” Euromat 2005, Prague, Czech Republic, September 2005.

 

“Atoms to go… Applications of Programmable Metallization Cell Technology From Memory To Microfluidics,” SEMI/NBA Nanoforum, Chicago, IL, November, 2005.

 

“Highly scalable resistance-change memory using solid electrolytes,” IEEE International Solid State Circuits Conference (ISSCC), San Francisco, CA, February, 2006.

 

“Nanostructured solid electrolytes and the future of memory,” Emerging Nanotechnology Trends – Opportunities and Challenges, 1st Annual Arizona Nanotechnology Symposium, Tempe, AZ, March, 2006.

 

“Fully Scalable Non-Volatile Memory Based on Solid Electrolytes,” Workshop on Performance and Scaling of Non-Volatile Memory Materials, IBM Almaden Research Center, San Jose, CA, April, 2006.

 

“A Review of Solid Electrolyte Memory,” International Symposium on Integrated Ferroelectrics, Honolulu, HI, April, 2006.

 

“Resistance-change devices based on solid electrolytes,” European Symposium on Phase Change and Ovonic Science (E*PCOS), Grenoble, France, May, 2006.

 

“Programmable Metallization Cell: From Academic Research to Market Place,” Nano and Giga Challenges in Electronics and Photonics, Phoenix, AZ, March 12-16, 2007.

 

“Memory Devices Based on Solid Electrolytes,” in Materials and Processes for Nonvolatile Memories, edited by T. Li, Y. Fujisaki, J. Slaughter, D. Tsoukalas, Mater. Res. Soc. Symp. Proc., vol. 997, I5.1, 2007.

 

“Highly Scalable Resistance Change Memory,” Fifty-First International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Denver, CO, May 29 - June 1, 2007.

 

 

Refereed archival journal papers

 

M.N. Kozicki, A.R. Dinnis and J.M. Robertson, “A Low Energy Electron Beam Annealing System:  Design, Capability and Use”, Scanning, 6, 3-7 (1984).

 

Q.Z. Zhang, M.N. Kozicki and D.K. Schroder, “The Effects of Non-uniform Oxide Thickness on MOSFET Performance”, IEEE Trans. Electron Devices, ED-35, 1395-1397 (1988).

 

G.H. Bernstein, W.P. Liu, Y.N. Khawaja, M.N. Kozicki, D.K. Ferry and L. Blum, “High-resolution Electron-beam Lithography with Negative Organic and Inorganic Resists”, J. Vac. Sci. Technol., B6, 2298-2302 (1988).

 

M.N. Kozicki, J.M. Robertson, H. Kheyrandish and A.E. Hill, “Silicide/Poly-silicon Gate Formation Using Dynamic Recoil Mixing”, J. Electrochem. Soc., 136, 873-875 (1989).

 

M.N. Kozicki and J.M. Robertson, “Silicide Formation on Polycrystalline-silicon by Direct Metal Implantation”, J. Electrochem. Soc., 136, 878-881 (1989).

 

D. Henscheid, M.N. Kozicki, G.W. Sheets, M. Mughal, I. Zwiebel and R.J. Graham, “Rapid Thermal Nitridation of Thin SiO2 Films”, J. Electronic Materials, 18, 99-104 (1989).

 

M.N. Kozicki, S.W. Hsia, A.E. Owen and P.J.S. Ewen, “PASS - A Chalcogenide-based Lithography Scheme for I.C. Fabrication”, J. Non-cryst. Solids, 137/138, 1341-1344 (1991).

 

F. Yano, V.A. Burrows, M.N. Kozicki and J. Ryan, “Infrared Study of Electron-beam Induced Reactions in Langmuir-Blodgett Films of Stearic Acid”, J. Vac. Sci. Technol., 11, 219-223 (1993).

 

P. Rastogi, M.N. Kozicki and F. Golshani, “EXPRO - an Expert System Based Process Manager”, IEEE Trans. Semiconductor Manufacturing, 6, 207-218 (1993).

 

F. Golshani, M.N. Kozicki and P. Rastogi, “A Real-Time Expert System for Process Management - The Design and Development of EXPRO”, Int. Journal of Artificial Intelligence Tools, 2, 541-556 (1993).

 

T.K. Whidden, J. Allgair, J.M. Ryan, M.N. Kozicki and D.K. Ferry, “Chemically-Amplified Etching of Oxides for Micro- and Nanolithographic Masks”, J. Electrochem. Soc., 142, 1199-1205 (1995).

 

M.N. Kozicki, R.W. Roberson, T.K. Whidden and S.E. Kersey, “Directed Growth of Uromyces Hyphae on Integrated Circuit Substrates”, J. Vac. Sci. Technol., A13, 1808-1813 (1995).

 

T.K. Whidden, J. Allgair, A. Jenkins-Gray and M.N. Kozicki, “Nanoscale STM Patterning of Silicon Dioxide Thin Films by Catalyzed HF Vapor Etching”, J. Vac. Sci. Technol., B13, 1337-1341 (1995).

 

T.K. Whidden, J. Allgair, A. Jenkins-Gray, M.N. Kozicki, and D.K. Ferry,  “Nanoscale Lithography with Electron Exposure of SiO2 Resists”, Jap. J. Appl. Phys., 34, 4420-4425 (1995).

 

J. Allgair, M. Khoury, M.J. Rack, T.K. Whidden, M.N. Kozicki, and D.K. Ferry “Formation of Nanoscale Cobalt Silicide and Gold Wires Using Electron Beam and Chemically Enhanced Vapor Etching”, J. Vac. Sci. Technol., A14, 1855-1859 (1996).

 

M. Pan, M. Yun, M.N. Kozicki and T.K. Whidden, “Self-assembled Monolayer Resists and Nanoscale Lithography of Silicon Dioxide Thin Films by Chemically Enhanced Vapor Etching (CEVE), Microstructures and Superlattices, 20, 369-376 (1996).

 

M. N. Kozicki, J. Allgair, D.K. Ferry, and T.K. Whidden, “The Use of Electron-beam Exposure and Chemically Enhanced Vapor Etching of SiO2 for Nanoscale Fabrication”, Physica B, 227, 318-322 (1996).

 

D.K. Ferry, M. Khoury, D.P. Pivin, K.M. Connolly, T.K. Whidden, M.N. Kozicki, and D.R. Allee, “Nanolithography”, Semiconductor Science and Technology, B, 11, 1552 - 1557 (1996).

 

J. Allgair, J.M. Ryan, H.J. Song, M.N. Kozicki, T.K. Whidden and D.K. Ferry, “Nanoscale Patterning of Silicon Dioxide Thin Films by Catalyzed HF Vapor Etching”, Nanotechnology, 7, 351 - 355 (1996).

 

T.K. Whidden, D.K. Ferry, M.N. Kozicki, E. Kim, A. Kumar, J. Wilbur and G.M. Whitesides, “Pattern Transfer to Silicon by Microcontact Printing and RIE”, Nanotechnology, 7, 447-451 (1996).

 

T.K. Whidden, A. Jenkins-Gray, M. Pan, and M.N. Kozicki, and “Chemically Enhanced Vapor Etching (CEVE) with Alkyl Acid Self-Assembled Monolayer Resists for Nanometer-Scale Lithography of Thin Film Silicon Dioxide Masks”, J. Electrochem. Soc., 144, 605 - 616 (1997).

 

H.A. McNally, M.N. Kozicki, R.W. Roberson, and T.K. Whidden, “Electrical Characterization of Uromyces Germ Tubes Grown on Integrated Circuit Substrates”, J. Vac. Sci. Technol., A15, 779-783 (1997).

 

A.H.M. Kamal, M.J. Rack, M.N. Kozicki, D.K. Ferry, J. Lutzen, and J.A. Hallmark, “Ultrathin Cobalt Silicide Layers Formed by Rapid Thermal Processing of Metal on Amorphous Silicon”, J. Vac. Sci. Technol., B15, 899-902 (1997).

 

M.N. Kozicki, B. Kardynal, S.-J. Yang, T. Kim, M.V. Sidorov, and D.J. Smith, "Application of Chemically Enhanced Vapor Etching in the Fabrication of Nanostructures", Semicond. Sci. Technol., 13, A63-A66 (1998).

 

A.H.M. Kamal, J. Lutzen, B.A. Sanborn, M.V. Sidorov, M.N. Kozicki, D.J. Smith, and D.K. Ferry, "A Two Terminal Nanocrystalline Silicon Memory Device at Room Temperature", Semicond. Sci. Technol., 13, 1328-1332 (1998).

 

J. Lutzen, A.H.M. Kamal, M.N. Kozicki, D.K. Ferry, M.V. Sidorov, and D.J. Smith, "Structural Characterization of Ultrathin Nanocrystalline Films Formed by Annealing Amorphous Silicon", J. Vac. Sci. Technol., B16, 2802-2805 (1998).

 

M.H. Yun, V.A. Burrows, and M.N. Kozicki, "Analysis of KOH Etching of (100) Silicon On Insulator for the Fabrication of Nanoscale Tips", J. Vac. Sci. Technol., B16, 2844-2848 (1998).

 

W.C. West, K.Sieradzki, B. Kardynal, and M.N. Kozicki, "Equivalent Circuit Modeling of the Ag/As0.24S0.36Ag0.40/Ag System Prepared by Photodissolution of Ag", J. Electrochem. Soc., 145, 2971-2974 (1998).

 

M.N. Kozicki, S.-J. Yang, T. Kim, and B. Kardynal, “A Novel Nanoscale Resist Using 10-Undecanoic Acid Monolayers on Silicon Dioxide”, Microelectronic Engineering, 47, 239-241 (1999).

 

Minhee Yun, Anthony Turner, Ronald J. Roedel, and Michael N. Kozicki, “Novel Lateral Field Emission Device fabricated on Silicon-on-Insulator Material, J. Vac. Sci. Technol., B17, 1-6 (1999).

 

M.N. Kozicki, S.-J. Yang, and B.W. Axelrod, “Electron-beam exposure of self-assembled monolayers of 10-undecenoic acid”, Superlattices and Microstructures, 27, 481-484 (2000).

 

M.N. Kozicki, M. Yun, S.-J. Yang, J.P. Aberouette, and J.P. Bird, “Nanoscale effects in devices based on chalcogenide solid solutions”, Superlattices and Microstructures, 27, 485-488 (2000).

 

J. Yang, T.J. Thornton, S.M. Goodnick, M. Kozicki and J. Lyding, “Buried channel silicon-on-insulator MOSFETs for hot-electron spectroscopy,” Physica B, vol. 314, 354-357 (2002).

 

M.Mitkova and M.N. Kozicki, “Silver incorporation in Ge-Se glasses used in programmable metallization cell devices,” J. Non-Cryst. Solids, vol. 299-302, 1023-1027 (2002).

 

M.N. Kozicki, M. Mitkova, J. Zhu, and M. Park, “Nanoscale phase separation in Ag-Ge-Se glasses,” Microelectronic Engineering, vol. 63/1-3,155-159 (2002).

 

Jinman Yang, L. de la Garza, T.J. Thornton, M. Kozicki, and D. Gust, “Controlling the Threshold Voltage of a MOSFET by Molecular Protonation of the Surface,” J. Vac. Sci. Technol. B, vol. 20, 1706-1709 (2002).

 

G.M. Laws, T.J. Thornton, Jinman Yang, L. de la Garza, M. Kozicki, and D. Gust, “Molecular Control of the Drain Current in a Buried Channel MOSFET,” Phys. Stat. Sol., vol. 233, 83-89 (2002).

 

P.S. Chakraborty, M.R. McCartney, J. Li, C. Gopalan, M. Gilbert, S. M. Goodnick, T.J. Thornton, M. N. Kozicki, “Electron Holographic Characterization of Ultra Shallow Junctions in Si for nanoscale MOSFETs,” IEEE Trans. Nanotechnology, vol. 2, 102-109 (2003).

 

P. Chakraborty, C. Gopalan, J. Yang, T. Kim, Z. Wu, M.R. McCartney, S. M. Goodnick, M. N. Kozicki, T.J. Thornton, “Shallow Source-Drain Extensions for Deep Submicron MOSFETs Using Spin-On Dopants,” IEEE Trans. Electron Devices, vol. 50/5, 1277-1283 (2003).

 

M. N. Kozicki, M. Mitkova, and J.P. Aberouette, “Nanostructure of Solid Electrolytes and Surface Electrodeposits,” Physica E: Low-dimensional Systems and Nanostructures, vol. 19/1-2, 161-166 (2003).

 

P.S. Chakraborty, M.R. McCartney, J. Li, C. Gopalan, U. Singisetti, S. M. Goodnick, T.J. Thornton, M. N. Kozicki, “Electron Holographic Characterization of Nanoscale Charge Distributions for Ultra Shallow PN Junctions in Si,” Physica E: Low-dimensional Systems and Nanostructures, vol. 19/1-2, 167-172 (2003).

 

Maria I. Mitkova, Michael N. Kozicki, Janmichael P. Aberouette, “Morphology of Electrochemically Grown Silver Deposits on Silver-Saturated Ge-Se Thin Films,” J. Non-cryst. Solids, vol. 326/327, 425-429 (2003).

 

G.M. Laws, T.J. Thornton, Jinman Yang, L. de la Garza, M. Kozicki, D. Gust, J. Gu, and D. Sarid, “Drain Current Control in a Hybrid Molecular/MOSFET device,” Physica E, vol. 17, 83-89 (2003).

 

M.N. Kozicki, P. Maroufkhani, M. Mitkova, “Flow Regulation in Microchannels via Electrical Alteration of Surface Properties,” Superlattices and Microstructures, vol. 34/3-6, 467-473 (2004).

 

M.N. Kozicki, M. Mitkova, M. Park, M. Balakrishnan, and C. Gopalan, “Information Storage using Nanoscale Electrodeposition of Metal in Solid Electrolytes,” Superlattices and Microstructures, vol. 34/3-6, 459-465 (2004).

 

M. Mitkova, M.N. Kozicki, H.C. Kim, and T.L. Alford, “Thermal and Photodiffusion of Ag in S-Rich Ge-S amorphous films,” Thin Solid Films, vol. 449, 248-253 (2004).

 

M. Mitkova, M. N. Kozicki, H. Kim, T. Alford, “Local Structure Resulting From Photo- and Thermal Diffusion of Ag in Ge-Se Thin Films,” J. Non-Cryst. Sol., vol 338-340C, 552-556 (2004).

 

Michael N. Kozicki, Mira Park, and Maria Mitkova, “Nanoscale Memory Elements Based on Solid-State Electrolytes,” IEEE Trans. Nanotechnology, vol. 4, 331-338 (2005).

 

Nad E. Gilbert, Chakravarthy Gopalan, and Michael N. Kozicki, “A macro model of programmable metallization cell devices,” Solid State Electronics, vol. 49, 1813–1819 (2005).

 

S. Enderling, C.L. Brown III, S. Smith, M.H. Dicks, J.T.M. Stevenson, M. Mitkova, M.N. Kozicki, and A.J. Walton, “Sheet Resistance Measurement of Non-Standard Cleanroom Materials Using Suspended Greek Cross Test Structures,” IEEE Trans. Semiconductor Manufacturing, vol. 19, 1, 2-9, (2006).

 

M.N. Kozicki and M. Mitkova, “Mass transport in chalcogenide electrolyte films – materials and applications,” Journal of Non-Crystalline Solids, vol. 352, 567–577 (2006).

 

M. Mitkova , M.N. Kozicki, H.C. Kim, and T.L. Alford, “Crystallization effects in annealed thin Ge–Se films photodiffused with Ag,” Journal of Non-Crystalline Solids, vol. 352, 1986–1990 (2006).

 

M.N. Kozicki, C. Gopalan, M. Balakrishnan, and M. Mitkova, “A Low-Power Nonvolatile Switching Element Based on Copper-Tungsten Oxide Solid Electrolyte,” IEEE Trans. Nanotechnology, vol. 5, 535–544 (2006).

 

M. Balakrishnan, M.N. Kozicki, C.D. Poweleit, S. Bhagat, T. L. Alford, and M. Mitkova, “Crystallization effects in annealed thin GeS2 films photodiffused with Ag,” Journal of Non-Crystalline Solids, vol. 353, 1454–1459 (2007).

 

C. Gopalan, M.N. Kozicki, S. Bhagat, S.C. Puthen Thermadam, T.L. Alford and M. Mitkova, “Structure of copper-doped tungsten oxide films for solid-state memory,” Journal of Non-Crystalline Solids, vol. 353, 1844–1848 (2007).

 

N.E. Gilbert and M.N. Kozicki, “An Embeddable Multilevel-Cell Solid Electrolyte Memory Array,” IEEE Journal of Solid-State Circuits, vol. 42, 1383-1391 (2007).

 

M. Balakrishnan, M. N. Kozicki, C. Poweleit, S. Bhagat, T. L. Alford, M. Mitkova, “Structural study of Cu photodoped Ge-S glasses,” Journal of Optoelectronics and Advanced Materials, vol. 9, 3241 – 3246 (2007).

 

C. Schindler, S.C.P. Thermadam, R. Waser, and M.N. Kozicki, “Bipolar and Unipolar Resistive Switching in Cu-Doped SiO2,” IEEE Trans. Electron Devices, vol. 54, 2762 – 2768 (2007).

 

 

National/international conference proceedings papers

 

M.N. Kozicki and J.M. Robertson, “Electron Beam Annealing of Co and Cr Implanted Polycrystalline Silicon”, Institute of Physics Conf. Ser. No. 67, 137-142 (1983).

 

M.N. Kozicki, “Formation and Oxidation of Implanted Cobalt Silicides on Polycrystalline-silicon”, Proc. IEEE Fifth VLSI Multilevel Interconnection Conference, 198-204 (1988).

 

M.N. Kozicki, V. Ramesh and D. Williams, “Carbon Enhanced Vapor Etching”, Proc. Interface ‘88, 283-299 (1988).

 

A.E. Owen, P.J.S. Ewen, A. Zakery, M.N. Kozicki and Y. Khawaja, “Metal-Chalcogenide Photoresists for High Resolution Lithography and Sub-micron Structures” in Nanostructure Physics and Fabrication (M.A. Reid and W.P. Kirk, Eds.), 447-451, Academic Press, San Diego, 1989.

 

P. Rastogi, M.N. Kozicki, T. Patel and G.W. Sheets, “Expert System Control of Dielectric Formation”, Proceedings of the Fourth Symposium on Automated Integrated Circuits Manufacturing, The Electrochemical Society, 89-2, 223-234 (1989).

 

D. Henscheid, M.N. Kozicki, I. Zwiebel, R.J. Graham, G.W. Sheets and E.G. Chang, “Dielectric Formation by Rapid Thermal Nitridation”, Proceedings of the 1988 Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, The Electrochemical Society, 89-7, 235-246 (1989).

 

M.N. Kozicki and P.J. Robinson, “Education in Microelectronics: Issues of Safety and Practices”, Proceedings of the Sixth International Conference on Technology and Education, 555-558 (1989).

 

M.N. Kozicki, Y. Khawaja, A.E. Owen, P.J.S. Ewen and A. Zakery, “As-S/Ag Systems for Integrated Optics”, Proceedings of the Sixth VLSI Multilevel Interconnection Conference, 251-257 (1989).

 

D.K. Ferry, M.N. Kozicki and G.B. Raupp, “Some Fundamental Issues on Metallization in VLSI”, Proceedings of the Conference on Metallization: Performance and Reliability Issues in VLSI (G.S. Gildenblat and G.P. Schwartz, Eds.), SPIE Vol. 1596, 2-11 (1991).

 

F. Golshani, M.N. Kozicki and P. Rastogi, “Real-time Process Management: The Design and Development of EXPRO”, Proc. Fifth International Symposium on Artificial Intelligence, Cancun, Mexico, 46-55 (1992).

 

M.N. Kozicki, “Disabled Employees in Controlled Environments”, Proceedings of the 8th International Conference on Advanced Technologies and Practices for Contamination Control, Philadelphia, 553-558 (1994).

 

K. Stoddart, P. Crouch, M. Kozicki and K. Tsakalis, “Application of Feed-Forward and Adaptive Feedback Control to Semiconductor Device Manufacture”, Proceedings of the American Control Conference, Baltimore, 892- 896 (1994).

 

T.K. Whidden , J. Allgair, J.M. Ryan, M.N. Kozicki, and D.K. Ferry, “Positionally Fixed Lewis Bases as Catalysts for Enhanced Rate HF Vapor Etching: Applications in Nanolithographic Processing”, in Proceedings of the 1994 Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, The Electrochemical Society, 94-16, 218-226 (1994).

 

M.N. Kozicki and J. Rice, “A Holistic Approach to Cleanroom Cleaning”, Proceedings of the 9th International Conference on Advanced Technologies and Practices for Contamination Control, Baltimore, 427-432 (1995).

 

M.N. Kozicki, “Disabled Employees in Controlled Environments - An Update”, Proceedings of the 9th International Conference on Advanced Technologies and Practices for Contamination Control, Baltimore, 444-450 (1995).

 

M.N. Kozicki, “Wheelchairs in Controlled Environments”, Proceedings of RESNA ‘95, Vancouver, BC (1995).

 

J.M. Ryan, J. Allgair, T.K. Whidden, M.N. Kozicki and D.K. Ferry, “Vapor Etching of Beam-Deposited Carbon on Silicon Dioxide Films” in Quantum Transport in Ultrasmall Devices (D.K. Ferry et al., Eds.), 437-440, Plenum Press, New York, 1995.

 

M.N. Kozicki and J. Rice, “Holistic Cleanroom Training - Structure and Benefits”, Proceedings of the 11th International Conference on Advanced Technologies and Practices for Contamination Control, Boston, MA, Tutorial 1-36 (1996).

 

M.N. Kozicki and J. Rice, “Cleanroom Training - Structure and Effectiveness”, Proceedings of the 1996 Conference on Advanced Microcontamination Control and Ultrapure Manufacturing, Santa Clara, CA, Tutorial 104 (1996).

 

INVITED - M.N. Kozicki and T.K. Whidden, “Nanoscale Pattern Definition Using Silicon Dioxide”, Silicon Nitride and Silicon Dioxide Thin Insulating Films IV, M.J. Deen, W.D. Brown, K.B. Sundaram, and S.I. Raider, Eds., The Electrochemical Society, 1997.

 

M.N. Kozicki, S.-J. Yang, T. Kim, and B. Kardynal, "A Novel Nanoscale Resist Using 10-undecanoic Acid Monolayers on Silicon Dioxide",  Fourth International Symposium on New Phenomena in Mesoscopic Structures,166-168 (1998).

 

B. Swaroop, W.C. West, G. Martinez, M.N. Kozicki, and L.A. Akers, “Programmable Current Mode Hebbian Learning Neural Network Using Programmable Metallization Cell,” Proceedings of the International Symposium on Circuits and Systems, vol. 3, 33-36 (1998).

 

M.N. Kozicki, M. Yun, L. Hilt, and A. Singh, “Applications of Programmable Resistance Changes in Metal-doped Chalcogenides”, Proceedings of the 1999 Symposium on Solid State Ionic Devices, Editors - E.D. Wachsman et al., The Electrochemical Society, Inc., 1 - 12 (1999).

 

INVITED - M.N. Kozicki and S.-J. Yang, “Novel Uses of Silicon Dioxide in Deep-Submicron Device Fabrication”, Proceedings of the Fifth International Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Editors – K.B. Sundaram and E. Garfunkel, The Electrochemical Society, Inc., 1 - 15 (1999).

 

M.N. Kozicki, W.C. West, B. Kardynal, L. Hilt, M. Yun, and A. Singh, “The Programmable Metallization Cell - Potential Applications in Critical Electronic Systems”, Proceedings of the International Conference on Integrated Nano/Microtechnology for Space Applications, The Institute for Advanced Interdisciplinary Research, ISBN 0-9661324-4-0 (1999).

 

S. Goodnick, J.P. Bird, D.K. Ferry, A. Gunther, M.N. Kozicki, M. Khoury, M.J. Rack, T. Thornton, and D. Vasileska, “Transport in Split Gate MOS Quantum Dot Structures”, Proceedings of the 9th Great Lakes Symposium on VLSI, IEEE Press, 394 - 396 (1999).

 

M.N. Kozicki and M. Mitkova, “Silver incorporation in thin films of selenium rich Ge-Se glasses”, Proceedings of the XIX International Congress on Glass, Society for Glass Technology, 226-227 (2001).

 

R. Symanczyk, M. Balakrishnan, C. Gopalan, T. Happ, M. Kozicki, M. Kund, T. Mikolajick, M. Mitkova, M. Park, C Pinnow, J. Robertson, and K. Ufert, “Electrical Characterization of Solid State Ionic Memory Elements,” Proceedings of the Non-Volatile Memory Technology Symposium, San Diego, CA, 17-1 (2003).

 

P.Boolchand, F.Wang, U.Vempati, M. Mitkova and M. Kozicki, Bimodal Tgs and macroscopic phase separation in Ag-Ge-S bulk glasses, Bull. Amer. Phys. Soc., 49, 826 (2004).

 

M.N. Kozicki, C. Gopalan, M. Balakrishnan, M. Park, and M. Mitkova, “Non-Volatile Memory Based on Solid Electrolytes,” Proceedings of the 2004 Non-Volatile Memory Technology Symposium, 10-17 (2004).

 

S. Enderling, C.L. Brown, III, M. Balakrishnan, J. Hedley, J.T.M. Stevenson, S. Bond, C.C. Dunare, A.J. Harris, J.S. Burdess, M. Mitkova, M.N. Kozicki and A.J. Walton,  “Tuning Scheme With MEMS Surface Micromachined Resonators,” Technical Digest of the 18th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2005), 159-162 (2005).

 

M.N. Kozicki, P. Maroufkhani and M. Mitkova, “Valving in Microchannels via Electrodeposition on Solid Electrolytes,” Technical Proceedings of the 2005 NSTI Nanotechnology Conference, Vol. 1, Chapter 11, 716-719 (2005).

 

S. Enderling, C. L. Brown III, S. Smith, M.H. Dicks, J.T.M. Stevenson, A.W.S. Ross, M. Mitkova, M.N. Kozicki and A.J. Walton, “Suspended Greek Cross Test Structures for Measuring the Sheet Resistance of Non-Standard Cleanroom Materials,” Proceedings of the International Conference on Microelectronic Test Structures (ICMTS 2005), 1-4 (2005).

 

M.N. Kozicki, C.L. Brown III, M. Mitkova, S. Enderling, J. Hedley and A.J. Walton, “Application of Mass Transport in Solid Electrolyte Films in Tunable Microelectromechanical Resonators,” Technical Proceedings of the 2005 NSTI Nanotechnology Conference, Vol. 3, Chapter 8, 447-450 (2005).

 

N.E. Gilbert, C. Gopalan, and M.N. Kozicki, “A Macro Model of Programmable Metallization Cell Devices,” Proceedings of the 1st International Conference on Memory Technology and Design, 177-180 (2005).

 

M.N. Kozicki, C. Gopalan, M. Balakrishnan, and M. Mitkova, “A Low Power Non-Volatile Switching Element Based on Copper-Tungsten Oxide Solid Electrolyte,” IEEE Silicon Nanoelectronics Workshop, 34-35 (2005).

 

M.N. Kozicki, M. Balakrishnan, C. Gopalan, C. Ratnakumar, and M. Mitkova, “Programmable Metallization Cell Memory Based on Ag-Ge-S and Cu-Ge-S Solid Electrolytes,” IEEE Non-Volatile Memory Technology Symposium (NVMTS), D5, 1-7 (2005).

 

INVITED –  M.N. Kozicki, “Resistance-change devices based on solid electrolytes,” Proceedings of the European Symposium on Phase Change and Ovonic Science (E*PCOS), 119-126 (2006).

 

M. Balakrishnan, S.C.P. Thermadam, M. Mitkova, and M.N. Kozicki, “A Low Power Non-Volatile Memory Element Based on Copper in Deposited Silicon Oxide,” Proceedings of the 7th Non-Volatile Memory Technology Symposium (NVMTS), 104-110 (2006).

 

C. Ratnakumar, M. Mitkova, and M.N. Kozicki, “Electrodeposit Formation in Solid Electrolytes,” Proceedings of the 7th Non-Volatile Memory Technology Symposium (NVMTS), 111-115 (2006).

 

INVITED - M.N.Kozicki, “Memory Devices Based on Solid Electrolytes,” in Materials and Processes for Nonvolatile Memories, edited by T. Li, Y. Fujisaki, J. Slaughter, D. Tsoukalas, Mater. Res. Soc. Symp. Proc., vol. 997, I5.1, 2007.

 

 

National/international conference abstracts (not included in proceedings)

 

M.N. Kozicki and J.M. Robertson, “CoSi2 Formation by Ion-Implantation”, Europhysics Conference Abstracts F7, 191-192 (1983).

 

A.G. Buttar, M.N. Kozicki and J.M. Robertson, “Temperature Modelling for Transient Annealing”, Europhysics Conference Abstracts F7, 161-162 (1983).

 

M.N. Kozicki, J.M. Robertson and R. Holwill, “Cobalt Polycide - Gate Material for VSLI”, IEE London, Digest No. 1983/90, 11/1-11/4 (1983).

 

M.N. Kozicki, “CMOS in Perspective”, CREST School, University of Edinburgh, 1984.

 

M.N. Kozicki, “Silicide Formation by Direct Metal Implantation”, Electrochemical Society Fall Meeting Extended Abstracts, 968-969 (1987).

 

G. Bernstein, W.P. Liu, Y. Khawaja, M.N. Kozicki, D.K. Ferry and L. Blum, “High-resolution Electron-beam Lithography in Negative Organic and Inorganic Resists”, 32nd International Symposium on Electron, Ion and Photon Beams, W-5, 1988.

 

D. Henscheid, M.N. Kozicki, G.W. Sheets, R.J. Graham, M. Mughal and I. Zwiebel, “Rapid Thermal Nitridation of Thin Silicon Dioxide Films”, Electronic Materials Conference, Q5, 1988.

 

G.W. Sheets and M.N. Kozicki, “Source/Drain Formation Using Spin-on Dopants and Subsequent Rapid Thermal Diffusion”, Electrochemical Society Fall Meeting Extended Abstracts, 687-688 (1988).

 

M.N. Kozicki, Y. Khawaja, J.L. Edwards, B. Qurashi, G. Bernstein and A.E. Owen, “Alternative Materials and Processes for Integrated Optics”, Electrochemical Society Fall Meeting Extended Abstracts, 890-891 (1988).

 

D. Henscheid, I. Zwiebel, M. Kozicki and R. Graham, “Rapid Thermal Nitridation of Thin SiO2 Films”, Abstracts of the AIChE Fall Meeting, 38C, 1988.

 

M.N. Kozicki, "The Application of Silicon Integrated Circuit Technology to Sensor Fabrication", Symposium on New Horizons in Chemical Sensors, 1989.

 

M.N. Kozicki, S.W. Hsia, A.E. Owen and P.J.S. Ewen, “PASS - A Chalcogenide-based Lithography Scheme for I.C. Fabrication”, Fourteenth International Conference on Amorphous Semiconductors, We-C1/1, 1991.

 

M.N. Kozicki, S. Balster, A. Jenkins, M. Polacca and V. Burrows, “Carbon and Sulfur Enhanced Vapor Etching of SiO2 Films”, Abstracts of the 183rd Meeting of the Electrochemical Society, Interface, Vol. 2, No. 2, 63 (1993).

 

J.M. Ryan, J. Allgair, M.N. Kozicki and D.K. Ferry, “Direct Patterning of SiO2 by Carbon Enhanced Vapor Etching”, Engineering Foundation Conference “Surfaces and Interfaces in Mesoscopic Systems”, 37, (1994).

 

M.N. Kozicki, “Physical Aids for Controlled Environments”, Abstracts of the Annual Fall Meeting of the Biomedical Engineering Society, RE-6 (1994).

 

M.N. Kozicki, R.W. Roberson, T.K. Whidden and S.E. Kersey, “Directed Growth of Uromyces Hyphae on Integrated Circuit Substrates”, Abstracts of the 41st National Symposium of the American Vacuum Society, BINS-WeM7 (1994).

 

T.K. Whidden, J. Allgair, A. Jenkins-Gray and M.N. Kozicki, “Nanoscale STM Patterning of Silicon Dioxide Thin Films by Catalyzed HF Vapor Etching”, Abstracts of the 41st National Symposium of the American Vacuum Society, NS-ThP15 (1994).

 

T.K. Whidden, J. Allgair, A. Jenkins-Gray, M.N. Kozicki, and D.K. Ferry, “Nanoscale Lithography with Electron Exposure of SiO2 Resists”, International Workshop on Mesoscopic Physics and Electronics, B09 (1995).

 

M.N. Kozicki, J. Allgair, and T.K. Whidden, “Nanostructure Fabrication by STM Exposure of SiO2 Resist”, 39th International Conference on Electron, Ion and Photon Beams, C50 (1995).

 

J. Allgair, A.