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APPENDIX A:  WORKSHOP AGENDA

NSF 2000 Workshop on Manufacturing of Micro-Electro-Mechanical Systems
DoubleTree Club Hotel, Lake Buena Vista, Orlando, Florida
November 6-7, 2000

Monday, November 6, 2000 (Tropical Room Lounge)

      18:00-20:00 Workshop registration and welcome reception

      Tuesday, November 7, 2000

      Morning Session (Tropical Room)
      7:00-8:00 Continental breakfast
      8:00-8:15 Welcome and Introduction (Professor Ampere A. Tseng)
      8:15-8:30 Opportunities for collaboration: The NSF Perspective (Dr. Delcie R. Durham)

      Overview Session (Tropical Room)
      8:30-9:00 Overview in MEMS Fabrication (Dr. William C. Tang)
      9:00-9:30 Overview in MEMS Applications (Dr. James Allen)
      9:30-10:00 Overview in MEMS Packaging and Reliability (Professor Yung-Cheng Lee)

      10:00-10:30 Coffee break (Tropical Room)

      Breakout Session (Breakout Room)
      10:30-12:00 Group I:  MEMS Fabrication (Dr. William C. Tang)
                          Group II:  MEMS Applications (Dr. James Allen)
                          Group III: MEMS Packaging and Reliability (Professor Yung-Cheng Lee)

      12:00-13:00 Lunch (Tropical Room)

      Breakout Session (Breakout Room)
      13:00-15:00 Group I:  MEMS Fabrication (Dr. William C. Tang)
                          Group II:  MEMS Applications (Dr. James Allen)
                          Group III: MEMS Packaging and Reliability (Professor Yung-Cheng Lee)

      15:00-15:30 Coffee break (Tropical Room)

      Joint Session (Tropical Room)
      15:30-16:30 Group Presentation and Joint Discussions (Drs Tang, Allen & Lee)
      16:30-17:30 Joint Recommendation (Drs Tang, Allen & Lee)
      17:30-18:30 Conclusion and Summary (Drs Tseng/Tang)

      18:30 Adjourn or Dinner