MSE Degree in Industrial Engineering, with a Specialization in Semiconductor Manufacturing:

Required Courses:
EEE 436 Fundamentals of Solid State Devices
CHE 458/598 Semiconductor Materials Processing
MSE 590 Electronic Thin Film Science
IEE 561 Production Systems
IEE 545 Introduction to Simulation
IEE 570 Advanced Quality Control
IEE 572 Design of Experiments
IEE 574 Deterministic Operations Research
IEE 591 Modeling and Analysis of Semiconductor Manufacturing

Elective Course:
One course from the following:
IEE 533 Scheduling and Network Analysis Models
IEE 575 Stochastic Operations Research
IEE 573 Reliability Engineering
IEE 578 Regression
IEE 582 Response Surface & Process Optimization
IEE 672 Advanced Experimental Design

For current course descriptions see the general course catalog.

You might also wish to check the Industrial and Manufacturing Systems Engineering homepage.